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MTL.03.NIR68 Industrial NIR Inspection Microscope
Description and Notes
MTL.03.NIR68 Industrial Infrared Inspection Microscope

--Industrial infrared microscopy imaging systems can observe the interior of packaged chips and wafers in real time.
--The infrared band (900-1700nm) has a wide spectral range, small scattering, and strong penetration into silicon wafers (germanium wafers).
--It adopts wide-field illumination and area array detection to achieve wide spectrum, large fielld of view and high-resollution imaging.
--The large numerical aperture objective lens (with adjusting ring) can eliminate aberrations caused by coverage of the object to be measured, achieving effective and accurate infrared detection.
Specification
Name of Part Order No Sepfification
MTL.03.NIR68
Eyepiece PLN10X22T Plan eyepiece PL10X/22mm, diopter adjustable
O
PLN10X22TR Plan eyepiece PL10X/22mm, diopter adjustable with reticle
O
PLN10X23T Plan eyepiece PL10X/23mm, diopter adjustable
●●
PLN10X23TR Plan eyepiece PL10X/23mm, diopter adjustable with reticle
O
Head NIRTH30R NIR Trinocular Head, Inclined 30 degree, Erect Image, Interpupillary 50-76mm,Beam splition,Bino/Trino: 100/0 or 0/100
Objective OLIP5-NIR Plan Plan Semi-APO NIR 5X/0.15,WD=19.5mm,Wave Length:450-1700nm
OLIP10-NIR Plan Plan Semi-APO NIR 10X/0.3,WD=12.2mm,Wave Length:450-1700nm
OLCIP20-NIR Plan Plan Semi-APO NIR 20X/0.45,WD=7.31-7.57mm,Cover glass: 0-1.2mm,Wave Length:450-1700nm
OLCIP50-NIR Plan Plan Semi-APO NIR 50X/0.7,WD=2.68-2.93mm,Cover glass:0-1.2mm,Wave Length:450-1700nm
Nosepiece PI115C6IMOTa Sextuple Motorized Nosepiece (with DIC slot)
Main Body NIR-MX68RF Reflected frame with low position coaxial focus mechanism, coarse range: 35mm, fine precision:0.001mm.With upper limit and tension adjustment. Built-in100-240V wide voltage system
NIR reflective illuminator, with a switch for changing bright field and NIR; with variable electric aperture diaphragm,Center is adjustable; With color filter slot; 12V 100W halogen light
Stage MXRTSGMC6 6" three layers mechanical stage 445x240mm, moving range for reflection: 158x158mm, for transmission: 100x100mm, glass stage, X, Y moving hand wheel, with clutch hand, right hand shank, can move quickly.
O
MXSGMC8 8" C3Three Layers Woring stage, stage size: 525x330MM ,Movement:210mmX210mm,with controller handle, can move quickly all range. Glass insert for transimitted light
Wafer Holder MXSGR 6inch Rotatable Wafer Stage (suitable for 4,5,6inch wafer)
O
MXSGMC8R 6inch Rotatable Wafer Stage (suitable for6,8inch wafer)
O
Light NIR-MX68RLH 12V100W Halogen Lamp House (centerpre-setting)
HB12-100 12V/100W Halogen Lamp(PHILIPS 7724)
●●
Filter NIR-1100 1100nm NIR Fitler (For reflection)
NIR-1200 1200nm NIR Filter (For reflection)
O
NIR-1300 1300nm NIR Filter (For reflection)
O
Camera OD130I 1.3 Mega pixel NIR camera(400-1700nm),monochrome camera, frame rate 125fps@1280x1024, pixel size 5 μ m
O
LT345R 3.2 Megavpixel NIR camera (400-1100nm) monochrome camera, frame rate 120fps@2064x 1544, pixel size 3.45 μm
CCD adapter RX50CTV1 1X CCD Focusalbe adapter,
Computer PC-NIR-24 Lenovo M460(i5-12400 16G 1T+256G HD)+23.8inch Monitor
Software MV Image-Industry Image processing, image acquisition, image management, measurement functions
Micrometer W-CAT909 Micrometer with 0.01mm division
Tools 6010X3293 M4 Straight Hex rench
6010x3245 M4 Hex rench
Packing Package PE Foam Box with Durable Paper box
● :Standard Parts, O:Optional