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MTL.03.12R 12inch Wafer Inspection Microscope
Description and Notes
MTL.03.12R 12inch Wafer Inspection Microscope
Specification
Name of Part Specification
MTL.03.12R
Head Trinocular Head, 0-35 °inclined, Erect Image,Interpupillary Distance 50~76mm,Split Ratio 0/100 or 100/0
●
Eyepiece High-Eyepoint Plan Eyepeiece PL10X/25mm,Diopter Adjustable
●
High-Eyepoint Plan Eyepeiece PL10X/25mm whit reticles,Diopter Adjustable
optional
BF/DF Objective BF/DF Infinity Semi-Aprochromatic Metallurgical Objective5X,WD=13.5,NA=0.15
●
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective10X,WD=9,NA=0.30
●
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective20X,WD=2.5,NA=0.50
optional
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective20X,WD=8.5,NA=0.40
●
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective50X,WD=1.0,NA=0.80
●
BF/DF Infinity Semi-Aprochromatic Metallurgical Objective100X,WD=1.0,NA=0.90
●
BF Objective BF Infinity Semi-Aprochromatic Metallurgical Objective5X,WD=19.5,NA=0.15
optional
BF Infinity Semi-Aprochromatic Metallurgical Objective10X,WD=10.9,NA=0.30
optional
BF Infinity Semi-Aprochromatic Metallurgical Objective10X,WD=3.2,NA=0.50
optional
BF Infinity Semi-Aprochromatic Metallurgical Objective50X,WD=1.2,NA=0.80
optional
BF Infinity Semi-Aprochromatic Metallurgical Objective100X,WD=1,NA=0.90
optional
Nosepiece BF/DF Motorized Sextuple Nosepiece, With DIC Slot
●
Working Stage 12X14inch Three Layers Woring stage, stage size: 420mmX718mm,Movement:305mmX356mm,with controller handle, can move quickly all range. Glass insert for transimitted light
●
Frame Body Reflected/Transmitted body, low-position coaxial coarse and fine adjustment, coarse adjustment distance: 35mm; fine precision:
0.001mm. With coarse adjustment stop and tightness adjustment.
Built-in 100-240V wide voltage transforme
●
Reflected Light BF/DF reflected illuminator with iris field diaphragm and aperture diaphragm, central adjustable. With filter slot and polarizing slot.
With Selector switch for Bright Field and Dark field Exchanging
●
Interface Filter interface filter Blue (for Reflected):≤480nm
optional
interface filter Green (for Reflected)::520nm-570nm
optional
interface filter Red (for Reflected)::630nm-750nm
optional
interface filter Natural (for Reflected):
●
Lamp 12V100W Tog light, Center fixed
●
12V/100W Halogen(PHILIPS 7724)
●
Polarizing Kits Polarizing Filter Slider For Reflect Light Source
●
Fixed Analysis Slider, For Reflect Light Source
●
CCD Adapter 0.5X CCD Adapter, Adjustable
optional
0.65X CCD Adapter, Adjustable
optional
1x CCD Adapter, Adjustable
optional

Note: ● Means Standard Parts; O means Optional Parts